Product Name：Small size active anti-vibration system
Description：

Active anti-vibration system VB51 combines excellent technology and provides users the most convenient and stable design. VB51 starts to isolate the vibration from the low frequency at 0.7Hz and speed up to 40dB after 10Hz. It is effective to isolate the low frequency resonance problems which semiconductors care most.

VB51

[Data Sheet]

Product Name：Active anti-vibration system
Description：

Koayen active anti-vibration system VB02 can isolate middle size or large size equipments such as electron microscope, UHV-STM and so on. It has the equal anti-vibration efficacy as desk-top systems. VB02 starts to isolate from the low frequency at 1.0Hz and speed up to 40dB after 20Hz. It is effective to isolate the low frequency resonance problems which semiconductors care most.

VB02

[Data Sheet]

Product Name：Active anti-vibration system
Description：

Koayen active anti-vibration system VB04 use electron transform utensil to feedback to isolate the vibration from the buildings and the systems themselves. In another word, it can even isolate the vibration from the operators when using high precise electron microscopes.

VB04

[Data Sheet]